Microsystems
From nanoelectronic devices to microfluidic platforms, the development of microsystems is a constant source of fascination for our researchers.
Nanotechnology presents a range of possibilities, but also a number of challenges. Using techniques such as nanolithography and microfluidic self-assembly, teams from the Institute of Microengineering are always developing innovative, groundbreaking nano- and microelectronic devices.
Key research themes
- MEMS/NEMS
- Micro-nanotechnology
- Micro-nanoelectronics
- Sensor and actuators
- Smart sensing systems
- Signal processing
- Energy harvesting
- Soft materials
- Microsystem integration
- BioMEMS
- Biosensors
- Bioelectronics
- Microfluidics
- Heterogeneous Integration
- Optical Microsystems
- High-speed AFM