Microsystems

Microsystems at the Institute of Microengineering

From nanoelectronic devices to microfluidic platforms, the development of microsystems is a constant source of fascination for our researchers.

Nanotechnology presents a range of possibilities, but also a number of challenges. Using techniques such as nanolithography and microfluidic self-assembly, teams from the Institute of Microengineering are always developing innovative, groundbreaking nano- and microelectronic devices.

Key research themes

 

  • MEMS/NEMS
  • Micro-nanotechnology
  • Micro-nanoelectronics
  • Sensor and actuators
  • Smart sensing systems
  • Signal processing
  • Energy harvesting
  • Soft materials
  • Microsystem integration
  • BioMEMS
  • Biosensors
  • Bioelectronics
  • Microfluidics
  • Heterogeneous Integration
  • Optical Microsystems
  • High-speed AFM

Video

Gallery